Series 18 – Episode 9 – Nanusens’ approach to MEMS integration

This entry is part 23 of 31 in the series Electronic Specifier Insights

Dr Montanyà i Silvestre is a telecommunications engineer with a PhD in MEMS technology from the University of Catalonia. He founded Nanusens in 2014 with a revolutionary approach to integrating MEMS directly into standard CMOS chip manufacturing processes.

The current MEMS market is fragmented, with each vendor using unique, bespoke manufacturing processes. Nanusens aims to standardise MEMS production by leveraging existing CMOS processing techniques, potentially transforming the industry similar to how CMOS standardised solid-state electronics.

Nanusens’ innovative approach involves using post-processing techniques with hydrofluoric acid vapor to create mechanical spaces within existing CMOS layers. Instead of adding new materials, they repurpose existing metal layers to create mechanical movements. This method allows for the creation of various MEMS devices, including sensors like accelerometers, gyroscopes, pressure sensors, microphones, and actuators.

The technology offers significant advantages, including unprecedented miniaturisation, lower power consumption, reduced costs, and the ability to produce devices at large volumes. By using standard CMOS processing, Nanusens can achieve smaller feature sizes, lower parasitic capacitance, and utilise multiple structural layers.

However, the approach has limitations. The company cannot choose specific materials, which restricts development of optical, biocompatible, and timing devices. The technical challenges have been substantial, requiring 20 years of research to develop design techniques that work with the inherent mechanical properties of CMOS materials.

Nanusens’ first target market is the mobile phone industry, specifically developing a digitally tunable RF capacitor for 6G smartphone antennas. This device addresses critical challenges in high-frequency communication, including managing high voltages and maintaining signal linearity. The company plans to bring this product to market by 2028.

The technology is particularly promising for mobile and wearable devices, offering the potential to reduce sensor footprints and improve battery life. In some cases, sensors could be completely embedded within digital processors, eliminating separate sensor chips.

Dr Montanyà i Silvestre reflects on his entrepreneurial journey, noting the challenges of funding R&D through private investment. He has learned valuable lessons about company governance, the importance of the right shareholders, and maintaining a strong connection between technical development and market needs.

Looking forward, Nanusens aims to become the reference company for MEMS devices, with its IPs widely used in integrated circuits. The company’s vision is to transition MEMS from specialised, separate technologies to mainstream components integrated directly into chips.

The long-term goal is to revolutionise MEMS manufacturing by making it as standardised and efficient as solid-state electronics production. By solving critical challenges in miniaturisation, power consumption, and performance, Nanusens is positioning itself at the forefront of a potential paradigm shift in semiconductor and sensor technology.

To hear more from Dr. Montanyà i Silvestre, you can listen to Electronic Specifier’s interview on Spotify or Apple podcasts.