Murata announces the successful development of what it believes to be the world’s first surface mount MEMS angular acceleration sensor. Recent years have seen a growing customer demand for angular acceleration sensors with compact dimensions, which also feature high sensitivity, low noise and wide frequency band.
Recognising this demand, Murata combined its technology for designing inertial sensors, such as acceleration and gyro sensors with its MEMS process technology.
Murata beleves the unit to be the world’s smallest SMD-type angular acceleration sensor, with dimensions of just 5.2x2.5x0.8mm. It incorporates a detection frequency band of more than 1kHz and an angular acceleration equivalent noise effective value of less than 1rad/s²ms.
Murata’s surface mount MEMS angular acceleration sensor can be used for the detection of angular acceleration and the detection of rotational vibration.
The unit has been patent registered in Japan and overseas and has more than than 10 patents pending.