The SMG06x sensor is based on a two-chip concept including the micro-machined sensing element and a separate evaluation ASIC. The oscillating polysilicon mass sensing element, is manufactured using state-of-the-art Bosch surface micro-machining technology.
The custom ACIC provides comprehensive digital signal evaluation enabling sophisticated safety features like a fully mechanical and electrical self-test, and continuous signal monitoring, which make the sensor the first choice for safety critical applications like rollover sens-ing.
The SMG06x is RoHS compliant.