The flow meter bi-directionally measures the flow of air and other non-aggressive gases at rates up to 200slm with high accuracy and very high speed.
It outputs a 14-bit digital signal at a 2kHz update rate. The signal is internally linearized and temperature compensated. Furthermore, the new mass flow meter operates from a 5Vdc supply voltage and features a digital 2-wire interface, making it easy to connect directly to a microcontroller.
The outstanding performance of the SFM3000 gas flow sensor is based on Sensirion’s patented CMOSens Technology, which combines the sensor element, signal processing and digital calibration on a tiny microchip
Gas flow is measured by a thermal sensor element to provide an extended dynamic range and enhanced long-term stability compared to other flow measuring technologies.
Thanks to the proven CMOSens technology, the flow meter is suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications in medical ventilation and anesthesia, as well as process automation and burner control.