Sensirion mass flow controllers in stock at Mouser
These controllers are CMOSens-based devices that measure gas mass flow by the calorimetric principle based on heat transfer.
Sensirion says that they achieve unmatched ratings for speed, accuracy, and repeatability at a very attractive system cost.
A heater element on a thermally insulated membrane and two thermopiles located upstream and downstream are integrated on a single silicon chip.
In the presence of gas flow, the temperature distribution up and downstream is disturbed. This asymmetry is then measured.
A larger channel design makes the device more robust against particles, clogging, and humidified gases.
Due to the compact single-chip design and mounting between metal parts, CMOSens-based sensors are also very resistant to electromagnetic disturbances (EMC).
Applications for the controllers include analytical instruments, bioreactors, medical equipment, process control, and industrial automation.