Enhanced handling of multi-port, low-pressure MEMS sensors

21st November 2019

Alex Lynn

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Boston Semi Equipment (BSE) has enhanced its Zeus gravity feed handlers with the capability of handling extremely low-pressure MEMS devices with multiple ports. The first to benefit from this new MEMS handling capability is a manufacturer of health monitoring systems who selected BSE’s Zeus pressure MEMS solution for its ability to provide extremely low-pressure stimulus combined with higher throughput.

The Zeus MEMS handler is faster, more economical, and requires significantly less floor space than their existing solution. Automotive, medical, industrial and consumer markets will benefit from the efficiencies and lower cost of test by handling pressure MEMS ICs in BSE’s Zeus handler.

“Boston Semi Equipment’s new low-pressure MEMS solution provides zero to 18 inches of H2O stimulus directly to the IC while still in the handler test site. This dramatically improves test cell throughput for our customers,” stated Kevin Brennan, Vice President of Marketing at BSE. “The Zeus pressure MEMS handler is unique because it can perform true differential pressure testing. Our BSE-designed pressure stimulus achieves desired pressure set points faster and more accurately than other solutions, which makes the Zeus handler for MEMS devices a winning investment.”

The Zeus pressure MEMS stimuli include zero to 18 inches of H2O, zero to three psia vacuum, and up to 150 psi. A 70-bar stimulus is in development. The Zeus is a tri-temperature handler that can be configured with up to eight test sites. Cold temperature testing is achieved using LN2 or a BSE-designed, two-stage chiller, the MR2.