Advanced Energy's new impedance matching network

25th June 2024
Caitlin Gittins

Advanced Energy Industries has introduced the NavX impedance matching network. 

This network features industry-leading algorithms and direct generator communication, offering unmatched precision and repeatability in plasma control, essential for 'Angstrom-Era' fabrication techniques.

In the realm of next-generation semiconductor etching, there is a pressing need for superior plasma control during rapid pulsing, frequent transitions, and extended process sequences. These are vital for producing smaller, faster, and more efficient chips with intricate 3D structures.

The NavX matching network by Advanced Energy is tailor-made with direct communication between match and generator, using ultra-fast tuning through AE hardware and proprietary algorithms. This setup allows for RF-synchronised impedance matching across multilevel pulse states, ensuring meticulous plasma characteristic control. Together with the eVerest generator, NavX forms part of AE’s latest Radio Frequency Delivery System (RFDS), which provides exceptional plasma control capabilities.

“Building on over 20 years of experience in developing advanced RF delivery systems for plasma processes, the NavX matching network redefines tuning speed, sophistication and RF synchronization for exacting plasma control across the most complex pulsing profiles,” said Juergen Braun, Advanced Energy’s Senior Vice President of plasma power products. “The platform’s groundbreaking selectable tuning algorithm, which enables impedance matching to multiple RF pulse states, instantly reduces reflected power in processes with shorter RF-on times.”

NavX seamlessly integrates with the eVerest RF generator and features Advanced Energy’s proprietary Selectable Tuning and Velocity Tuning algorithms, enhancing response speeds for pulse sequences. The system's +/- 10% frequency span accelerates tuning and expands the accessible impedance range. Additionally, its immunity to Intermodulation Distortion (IMD) ensures accurate tuning in multi-frequency scenarios, while scalable pulse states open avenues to novel energy regimes.

Furthermore, the NavX matching network is fully compatible with the PowerInsight by Advanced Energy IoT platform, offering rapid access to high-resolution, actionable data to facilitate process optimisation.

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