Systems boost LED Production for Taiwan manufacturer

This recent order brings the total number of tools ordered by this company up to 25, comprising a mixture of Oxford Instruments’ family of batch production solutions including the compact 800Plus PECVD system for high quality dielectric films; the System133 PECVD batch deposition tool for thick film deposition and the System133 ICP tool for high quality etching of sapphire and GaN.

Oxford Instruments systems were chosen as they offer very high throughput and uniformity, which is crucial in the production of HBLEDs.

Mark Vosloo, Sales Director at Oxford Instruments Plasma Technology explains, “We are extremely pleased to supply such a major player in this area with so many of our high quality tools, across the range, to satisfy their production requirements. Oxford Instruments has been a leading supplier of equipment to HBLED manufacturers for over 10 years, and this order is testament to the continuous product and process development at the company, which allows us to supply our customers with industry leading throughput and quality.”

Oxford Instruments aims to pursue responsible development and deeper understanding of the world through Science and Technology, and this latest multiple order from such an important player in the rapidly expanding HBLED market only reinforces this.