Imec was responsible for the development and processing of the back-scattered and stem electron sensors, according to FEI’s custom specifications, with focus on sensitivity to low energy electrons and high reliability.
The imec portfolio contains a wide variety of device technologies on its 200mm process line such as CMOS, Si-photonics, MEMS, image sensors and packaging, and the company also provides design, testing and reliability.
Imec provides a range of services, from feasibility studies over design and technology development to prototyping and low-volume manufacturing. Through its alliances, imec can also offer a path to transfer the technology to a foundry for volume production.
