The ZPS system provides high-precision, non-contact absolute position measurements on up to 64 synchronised channels. Key features include a new compact optical sensor and hardware platform that delivers sensitivity, resolution and stability over a range of 1.2mm. The advanced optical sensor generates virtually no heat and is insensitive to electromagnetic interference, achieving measurement resolution of 0.01nm with better than 1nm/day measurement stability.
In addition, the ZPS system utilises fibre optic cabling that allows for the use of a remote sensor location without impacting the measurement data. Optional accessories enable real-time automatic compensation for changes in ambient environmental conditions.
“The ZPS system represents the next evolution of sensors for short-range position metrology by combining simplified integration, expandability, reliability and performance into a single system,” remarked Ernesto Abruña, Product Manager for Precision Positioning Systems, ZYGO.
“With these unique capabilities, the ZPS system is a great fit for many nano-positioning applications in which closed-loop control across multiple axes of motion is desired, especially in deformable optical components and complex optical systems.”
