Presented by SEMI and Semiconductor Digest each year, the Best of West award recognises innovative new products or services that are significantly advancing the electronics manufacturing supply chain or a particular manufacturing capability.
The Echo opto-acoustic metrology system delivers non-destructive wafer-level metrology for measurements of single and multi-layer opaque films ranging in thickness from 50Å to 35µm. It uses Picosecond laser ultrasonic (PULSE) technology, a semiconductor industry workhorse for over 20 years that provides comprehensive metal film thickness metrology.
“The Echo system provides metal thickness and characterisation for a variety of devices, including RF filters for 5G communications, and power devices for the rapidly growing electric vehicle (EV) and high-speed portable charger markets,” said Pete Singer, Editor-in-Chief of Semiconductor Digest. “Congratulations to Onto Innovation for winning the Best of West competition two years in a row.”
The company’s Atlas V Optical Critical Dimension Metrology Tool won the award in 2022.
Onto Innovation works in process control, combining global scale with an expanded portfolio of technologies that include:
- Un-patterned wafer analysis
- 3D metrology spanning chip features from nanometre scale transistors to large die interconnects
- Macro defect inspection of wafers and packages
- Metal interconnect composition
- Factory analytics
- Lithography for advanced semiconductor packaging
