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Advanced Energy at SEMICON Japan 2023

8th December 2023
Harry Fowle

Advanced Energy will showcase plasma power technologies and complementary products for many stages of the IC fabrication and testing process at SEMICON Japan 2023.

From December 13-15, visitors to Advanced Energy's booth 4920 will discover new products such as the eVerest RF Plasma Power Generator and innovative eVoS Asymmetric Bias Waveform Generator. These products are engineered to deliver the precise plasma control, stability and repeatability essential for maximizing throughput and yield in the fabrication of next-generation, sub-2 nm semiconductors. Measurement solutions, including the recently launched Luxtron M-1100 FluorOptic temperature converter for precision measurement in extremely low and high temperatures, will also be on display.

"Advanced Energy will continue enabling its theme of 'Advancing the Angstrom Era’,” says Juergen Braun, Advanced Energy’s senior vice president of Plasma Power Products. “Following the successful launch of eVerest, eVoS ME and the latest Luxtron solutions at SEMICON West, we look forward to showcasing these transformational technologies for next-generation process architectures at SEMICON Japan."

In addition to plasma power, RF measurement, temperature measurement and temperature control solutions, visitors can view the PowerInsight by Advanced Energy IoT data ecosystem. This platform enables access to high-resolution, high-bandwidth data and supports faster, more accurate process characterization and troubleshooting.

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