Analysis
BTU International’s TRITAN HV90 Dual-Lane Metallization Firing System Successfully Completes Marathon Test
BTU International, Inc., announces that its TRITAN HV90 dual-lane metallization firing system has successfully completed a marathon test, producing in excess of 60 million cells.
“CThe TRITAN HV90 dual-lane metallization firing system features increased throughput at 3600 wafers per hour, an edge belt, volatile organic compound (VOC) abatement and a single zone spike with less than 3 seconds spike time. The TRITAN metallization firing system features BTU’s unique TriSpeed™ technology, allowing users to take advantage of superior ramp rates — up to 200ºC per second — while not compromising the drying and cooling sections of the profile. The three-belt, three-speed system provides revolutionary control of profile development. In trials, TRITAN has consistently shown an improvement in fill factor, resulting in increased efficiency.