memsstar completes installation of two MEMS etch systems

30th November 2016
Enaie Azambuja

memsstar announced that it has installed two ORBIS ALPHA systems in Bosch’s German research and development facility in Renningen. The systems will be used in Bosch’s development efforts for the next generation of MEMS devices. Introduced in 2014, ORBIS systems deliver the industry’s most advanced single-wafer process capability for advanced MEMS manufacturing.

memsstar is a leading provider of etch and deposition equipment and technology solutions to manufacturers of semiconductors and micro-electrical mechanical systems. “With the anticipated growth in the MEMS market, MEMS manufacturing must advance rapidly to address emerging market requirements,” said Tony McKie, CEO of memsstar.

“The need for high-performance MEMS devices is driving new development efforts to reduce process variations, and improve uniformity and reliability. The ALPHA system brings our unique, production-proven processing technology to R&D facilities to accelerate MEMS process development. Bosch is one of the major innovators in MEMS devices and we are delighted to play a part in Bosch’s future products.”

The ORBIS platform is an enabling technology for next-generation MEMS manufacturing. It includes fully integrated process monitoring and endpoint control, a high-selectivity package and a proven hardware that delivers excellent uniformity and repeatability, critical to improving yield.

The ALPHA was designed for R&D facilities and is based on memsstar’s production-proven continuous-flow processing technology. This combination of benefits enables advanced process development on a cost-effective platform.

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