MEMS-based gyro sensor device for car navigation systems from Murata
An innovative MEMS-based gyro sensor device for car navigation systems has been launched by Murata, offering performance and manufacturing advantages over traditional approaches. Constructed as a System in Package (SiP), this microelectromechanical system device contains a silicon based vibration device and a custom designed integrated circuit for the capacitive sensor circuitry. The two chips are mounted on a ceramic substrate, and then hermetically sealed in a ceramic surface mount package.Both
Murata’s gyro sensor uses Coriolis force principle of detecting angular velocity, whereby four masses are positioned between two driving beams. By flexing the driving beams, the masses are vibrated along the x-axis. Then, when angular velocity is applied, two detecting masses are vibrated along the y-axis, producing a rotation in the opposite direction to the Coriolis force.
This technique results in lower acceleration noise, when compared to acceleration techniques, as the capacitive variations are cancelled out. Further, the device uses digital signal compensation to deliver low offset drift over the temperature range.
Features include fast response, low driving voltage and low current consumption. Technical specifications over the –40oC to +85oC operating temperature range include: linearity error of –0.5% to +0.5% FS; output noise of 10mV peak to peak; start up drift of –0.4 to +0.4degrees/s from 1s to 5mins and –0.8 to +0.8degrees/s from 1s to 15min; and frequency response (frequency vs gain) of –4dB to –1dB with gain at 7Hz.
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