Analysis
Liquid Nitrogen Auto Changeover Upgrade offers savings
As a leader in systems and processes for etch, deposition and growth, Oxford Instruments Plasma Technology (OIPT) is continuously designing upgrades for its systems, processes and software as new techniques are developed. In this way the company can offer greater efficiencies and cost savings to its customers.
The OIPT’s Liquid Nitrogen (LN2) ACU gives accelerated cooling in temperature range 200°C to 0°C, and saves time when rapid mode change is required. The Unmanned/Overnight mode change gives time for the table temperature to stabilise, ready for process at the beginning of the next day. With a setpoint range of between -150ºC to +400ºC and more efficient use of LN2, this fully automated upgrade will save users time and money.
All new or existing Oxford Instrument’s systems with a Cryo Table or RIE heated electrode are compatible with the LN2 Auto Changeover Unit.