OIPT cluster systems offer high vacuum options for the handler and process modules, resulting in reduced background contamination levels, and the ability to cluster different deposition technologies. The Bosch system also incorporates a high temperature substrate table option up to 700ºC, and flexibility of power ramping within the software, thus minimising potential damage at the start of process.
Based in Stuttgart, Germany, Bosch develops, manufactures, and markets wafer-based and thin film silicon solar cells that are characterised by high, stable output with narrow output tolerance. The company has purchased the OIPT cluster tool for use in research and development.
With the increasing trend towards generating energy by renewable means, OIPT is establishing itself as a key supplier to the growing PV R&D market, and has more than doubled its turnover in this sector compared to last year.