Five Module Cluster Tool for growing PV market

8th April 2010

ES Admin

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Oxford Instruments Plasma Technology (OIPT) has just won a contract for a five module cluster tool from Robert Bosch, one of the world’s leading manufacturers of solar cells. The System100Pro deposition tool is a ‘Hex Handler’ providing capabilities for several deposition technologies, allowing multiple process steps to be carried out without a vacuum break. The cluster tool has the option of integrating a Kelvin Probe for in-situ measurement capability of material work functions and photo voltage, without a vacuum break.

OIPT cluster systems offer high vacuum options for the handler and process modules, resulting in reduced background contamination levels, and the ability to cluster different deposition technologies. The Bosch system also incorporates a high temperature substrate table option up to 700ºC, and flexibility of power ramping within the software, thus minimising potential damage at the start of process.

Based in Stuttgart, Germany, Bosch develops, manufactures, and markets wafer-based and thin film silicon solar cells that are characterised by high, stable output with narrow output tolerance. The company has purchased the OIPT cluster tool for use in research and development.

With the increasing trend towards generating energy by renewable means, OIPT is establishing itself as a key supplier to the growing PV R&D market, and has more than doubled its turnover in this sector compared to last year.