At booth 844, discover Advanced Energy’s latest, comprehensive “end-to-end” technologies for system and embedded power, including sensing and measurement solutions, as well as power supplies optimised for etch, deposition, implant, RTP (rapid thermal processing), wafer control and wafer inspection. Live demonstrations of these technologies will also be available.
“Advanced Energy powers partner innovation with an expanded range of power and measurement solutions,” said Dhaval Dhayatkar, Senior Director of Marketing, Plasma Power at Advanced Energy. “At SEMICON West 2022, AE will showcase its latest solutions that maximize productivity for a wide variety of existing platform and process requirements, as well as supporting next-generation requirements as we head toward Angstrom-level architectures.’”
Among the technologies at the Advanced Energy booth (booth 844) will be remote plasma sources, pulsed power supplies, AC/DC power supplies, RF generators, matching networks, amplifiers and high-accuracy temperature sensing modules. In addition, the company will demonstrate PowerInsight by Advanced Energy, a monitoring and analytics platform specifically designed to bring actionable intelligence and insights to critical power-delivery systems and allow operators to maximise performance, cut costs and improve yield.