The new barometric pressure sensor SMP480 is designed for a standard pressure range of 40 kPa…115 kPa. It is composed of a 2-chip-architecture. The sensor element is manufactured with the Bosch APSM (Advanced Porous Silicon Membrane) process. The APSM technology allows producing a stable single-crystalline membrane with a surface micro-mechanic process.
The pressure signal is amplified and temperature compensated by a separate ASIC manufactured in a highly integrated CMOS technology. The digital signal evaluation enables elaborate self tests. Additionally to the pressure signal the sensor provides a temperature signal.
With these technologies we realized a very robust design and achieved high sensor accuracy. The sensor is protected against short circuit and ESD and is also RoHS compliant.