Sensirion high precision Liquid Flow Sensor for 0-120ml/min flow rates

Dr. Andres Laib, Director of Sales Liquid Flow Products, commented: The SLQ-QT500 is perfect for the high purity requirements of the semiconductor industry. It can be used to monitor coating processes with a variety of liquids and enables optimal process safety.

The microthermal flow measurement is performed through the flow channel wall, which separates the chip from the measured liquids. This means that only the quartz flow channel and the the PFA tubing are in direct contact with the liquid, guaranteeing superb chemical resistance.

The sensor is able to achieve an exceptionally reliable measurement with a sample rate of up to 1 ms thanks to these features. The SLQ-QT500 sensor is based on the patented CMOSens Technology. With this unique technology even liquids with a very high viscosity (100,000 cP and more) are not a problem.

The sensor is suitable for measuring hydrocarbon-based solvents such as photoresists, as well as water-based liquids such as TARC and H2O2. With the SLQ-QT500, liquids with virtually any viscosity as well as liquids which contain particles can be measured. This makes the sensor unique in the liquid flow sensor industry,” summarised Andres Laib.