Increasing efficiency of heating for semiconductor production

The flat, low-profile emitter is surrounded by quartz glass material, a specially developed quartz glass, and this combination helps transfer infrared heat very homogeneously at a high energy density. This makes heating processes more efficient in both space and energy. Wherever space is short and fast, homogeneous heating is required, switching to black.infrared can significantly shorten process times and considerably improve quality, such as in microchip production.

The emitters are also suited for ultrapure processes and vacuum conditions. In contrast to conventional ceramic and metal emitters, the process can minimise impurities during wafer production.

Rolf Diehl, Vice President of Heraeus Noblelight explained: “Black.infrared was developed with the demanding requirements of semiconductor production and photovoltaics in mind. This combination of design and emitter technology is a revolutionary breakthrough for efficient, ultrapure heating processes under vacuum conditions.”

Semiconductor process technology requires multiple thermal processes that dry or heat during the production of microchips, such as those used in smartphones. It is important in this process to avoid both chemical impurities in the microchips and particles from entering during the individual production process steps. Even the tiniest trace impurities during manufacturing will result in a defective microchip, which is then unusable.

The new Heraeus emitters use a specially developed quartz glass as a carrier material. Due to its high chemical purity (it consists solely of silicon and oxygen), it is suited for these thermal processes. Black.infrared emitters have been constructed to allow for the greatest possible homogeneity at relatively close proximity. That helps to use the process space optimally.

Tests and development projects have shown that the new combination’s very high homogeneity and optimally adjusted emitters can contribute to greater energy efficiency.

Diehl added: “The black.infrared emitter combines an infrared emitter in the medium wave range of around 2.5 micrometres with high optical performance for the first time. This combination is unique.”

In the future, additional industrial heating processes could also benefit from new infrared systems given that infrared emitters with medium wavelengths are particularly suited for glass, plastic and most coatings.