Mixed-Signal Interconnect Solution for Semiconductor Device Probers and Characterization Equipment from Keithley

The design of these high performance triaxial cable kits makes them ideal for those whose characterization requirements demand frequent switching between measurement types. These new cable kits eliminate the need for recabling when switching between measurement types, also eliminating the measurement errors that often result from cabling errors. Two versions of the cable kit are available—one optimized for use with Cascade Microtech probers and the other for use with SUSS MicroTec probers.

Characterizing semiconductor devices electrically and understanding the processes used in their production demands a wide array of measurements, including DC I‑V, C‑V, and pulsed I‑V measurements. One of the most significant challenges associated with integrating these measurement types in a single characterization system is that each one has fundamentally different cabling requirements. For example, making low current I‑V measurements demands guarding, so triaxial cables are required. C‑V measurements are typically made using four coaxial cables with their outer shells connected together to control the characteristic impedance the signals encounter. Pulsed measurements require the highest bandwidth of the three measurement types, so the characteristic impedance of the cabling must match the source impedance in order to prevent reflections from the DUT from reflecting off the source.

Keithley’s new cabling kits are designed with these differing requirements in mind. No matter what type of measurement is being made, no changes to the probe manipulator cabling are required; the cables can simply be moved from one set of instrument connections to another, which makes it much easier to switch between I-V measurements, C-V measurements, and pulsed I-V testing, simplifying the device characterization process. In addition, the setup changes can be made while the probe needles are in contact with a wafer, reducing pad damage and maintaining the same contact impedance for all three types of measurements.

Keithley’s Model 4200‑SCS replaces a variety of electrical test tools with a single, tightly integrated characterization solution and is ideal for a wide variety of applications including semiconductor technology development, process development, and materials research in reliability labs, materials and device research labs and consortia, as well as any lab needing a benchtop DC or pulse instrument. Keithley has continually enhanced the Model 4200‑SCS’s hardware and software ever since its introduction. This commitment to ongoing system innovation assures a cost‑effective upgrade path, so users don’t have to buy a new parametric analyzer because their old one is obsolete. Systems can be upgraded cost‑effectively to keep up with the industry's evolving test needs, so capital investments in the Model 4200‑SCS stretch much further than with competitive test solutions.