Test & Measurement

EDS capabilities added to FE-SEM system

10th February 2015
Mick Elliott
0

Keysight Technologies’ latest field-emission scanning electron microscope (FE-SEM), the 8500B, offers scientists the analytical power of energy dispersive spectroscopy (EDS), fully integrated within a compact, low-voltage FE-SEM. The plug-and-play FE-SEM has been designed for use in practically any lab and requires only an AC power outlet. The image resolution rivals that of much larger and more expensive FE-SEMs.

The new system’s fully integrated silicon-drift x-ray detector, digital multichannel analyser and intuitive software interface put EDS capabilities at researchers’ fingertips, allowing them to perform quantitative elemental analysis on arbitrary points, on a continuous line scan or in a user-defined regional map. The microscope is capable of detecting elements as light as carbon, up to americium.

EDS results are analysed and displayed in real time and researchers can export the data for further off-line analysis. Keysight’s patented event-streamed spectrum imaging saves the full spectrum at every pixel for analysis and display. Dynamic element mapping allows real-time selection or editing of elements and processing parameters during spectrum image collection.

The 8500B also offers several low-voltage imaging techniques for enhancing surface contrast and allowing the observation of nanoscale features on a wide variety of nanostructured materials, including polymers, thin films, biomaterials, and other energy-sensitive samples on any substrate, even glass. A novel, compact electrostatic lens and electron beam column design helps guarantee consistent, replicable performance without constant re-tuning of the column.

In addition, continuously variable beam energy optimised for low-voltage operation minimises the need to conductively coat samples when using the Keysight 8500B FE-SEM. A software-controlled, programmable X/Y/Z stage enables simple sample navigation.

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